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椭偏仪整合loaderlock

According to customers’ requirements, we are able to provide ellipsometer integration with automatic loadlock design, which can quickly measure the coating thickness and uniformity in vacuum environment after the process is completed.  It can avoid atmospheric contamination and improve the coating efficiency.  
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Product Description

According to customers’ requirements, we are able to provide ellipsometer integration with automatic loadlock design, which can quickly measure the coating thickness and uniformity in vacuum environment after the process is completed. It can avoid atmospheric contamination and improve the coating efficiency.

 

椭偏仪整合loaderlock

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椭偏仪整合loaderlock
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