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Atomic Nano-Materials and Equipment Co.,Ltd
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R&D Machine

Production Machine

Industrial Type Equipment

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R&D Equipment

The mature mass production version of The Elegant II-Y series has been added with a fully self-developed automatic wafer loading and transfer system, which can load 25 6/8 "wafers at one time using standard or custom Cassette, making it ideal for pilot or final test applications. The wafer loading system, equipped with sophisticated stepper motors and sensors, enables precise wafer positioning and counting, as well as precise wafer loading and unloading with a robotic arm. The same dual cavity and separate source inlet design ensures source utilization and reduces cross-contamination. Several upgrade ports allow plasma intensification and thermal processes to be implemented in the same vacuum chamber, making it particularly suitable for mass production of compound semiconductor devices.
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Precursors and Cylinders

We offer both common and customized metalorganic precursors used in ALD applications. These precursors are vigorously tested in our own equipment before shipment to ensure their quality. We provide hassle-free solution to our customers that includes recycling of used cylinders, manufacturing of new cylinders or other mechanical parts according to customer’s drawings, door to door shipment of precursors, handling of both inbound and outbound customs declaration, all at competitive prices and lead times. Some of our precursors and services are listed below. Please feel free to contact our sales team for consultation and quotation.

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Made-to-Order Equipment

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