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Atomic Nano-Materials and Equipments Co.,Ltd
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R&D Machine

Production Machine

R&D Machine

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Production Machine

The mature mass production version of The Elegant II-Y series has been added with a fully self-developed automatic wafer loading and transfer system, which can load 25 6/8 "wafers at one time using standard or custom Cassette, making it ideal for pilot or final test applications. The wafer loading system, equipped with sophisticated stepper motors and sensors, enables precise wafer positioning and counting, as well as precise wafer loading and unloading with a robotic arm. The same dual cavity and separate source inlet design ensures source utilization and reduces cross-contamination. Several upgrade ports allow plasma intensification and thermal processes to be implemented in the same vacuum chamber, making it particularly suitable for mass production of compound semiconductor devices.
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Contact us

 

Fixed telephone:+025-58277112

Sales call:15655060066潘经理 (销售一处)

                  13770542509龙经理(销售二处)

                  15895990041张经理(销售三处)

Address:22nd Floor, Building B, Qingyun Building, 266 Puyun Road, Jiangbei New District, Nanjing

E-mail:sales@aname-nj.com 

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