Al2O3 Thermal_ALD
|
Substrate size |
4 inches, 6 inches, 8 inches |
|
Film type |
Al2O3 |
|
Process types |
Thermal_ALD |
|
Temperature range |
Both high and low temperatures are possible (please leave a message for detailed requirements) |
|
density |
Passed KHF erosion experiment with excellent result |
|
The surface roughness is 25 nm Ra |
0.21 |
|
1-σ（%） |
<2 |
|
GPC/(A°) |
0.94 |
Contact us
Telephone: +025-58277112
Sales Telephone: Manager Pan 15655060066
Manager Zhang 13815424556
13815424556Manager Zhang (North China, Northwest China, Northeast China)
Overseas Business Department Tel: Manager 17721046096 Wang
After-sales service telephone: Manager 15850767261 Ni
Address: 22nd and 25th floors, Building B, Qingyun Building, No. 266, Puyun Road, Jiangbei New District, Nanjing
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