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Al2O3 PE_ALD
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Number of views:
1000
Product serial number
Category
Craft show
Quantity
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+
1
Detailed description
|
Substrate size |
4 inches, 6 inches, 8 inches |
|
Material |
Al2O3 |
|
Process types |
PE_ALD |
|
Temperature range |
Both high and low temperatures are possible (please leave a message for detailed requirements) |
|
Sample power |
Low power |
|
density |
Passed KHF erosion experiment with excellent result |
|
Surface roughness Ra |
0.19 |
|
1-σ（%） |
<2 |
|
GPC/(A°) |
0.94 |
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