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AIN PE_ALD
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Number of views:
1000
Product serial number
Category
Craft show
Quantity
-
+
1
Detailed description
Substrate size |
4 inches, 6 inches, 8 inches |
Material |
AlN |
Process types |
PE_ALD |
Temperature range |
Both high and low temperatures are possible (please leave a message for detailed requirements) |
Sample power |
Low power |
Surface roughness Ra |
0.23 |
1-σ（%） |
<2 |
GPC/(A°) |
1.09 |
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