BAT 300 R2R
Double chamber design self-developed by ANAME ensures high utilization rate of precursor;
Proprietary gas flow and heating methods to ensure high uniformity;
Unique cavity structure to avoid cross-contamination between different processes, convenient maintenance;
Modular design, adjustable electrical and gas cabinet positions, independent sampling space, compatible with high-level clean room production space;
Large batch wafer processing capacity to reduce production and equipment costs;
Compatible with various sizes of samples, easy to upgrade;
Currently the world's most cost-effective industrial machine.
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