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Atomic Nano-Materials and Equipments Co.,Ltd
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BAT 300 R2R

Double chamber design self-developed by ANAME ensures high utilization rate of precursor;
Proprietary gas flow and heating methods to ensure high uniformity;  
Unique cavity structure to avoid cross-contamination between different processes, convenient maintenance;  
Modular design, adjustable electrical and gas cabinet positions, independent sampling space, compatible with high-level clean room production space;  
Large batch wafer processing capacity to reduce production and equipment costs;  
Compatible with various sizes of samples, easy to upgrade;  
Currently the world's most cost-effective industrial machine.
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Product Description

Double chamber design self-developed by ANAME ensures high utilization rate of precursor;

Proprietary gas flow and heating methods to ensure high uniformity;

Unique cavity structure to avoid cross-contamination between different processes, convenient maintenance;

Modular design, adjustable electrical and gas cabinet positions, independent sampling space, compatible with high-level clean room production space;

Large batch wafer processing capacity to reduce production and equipment costs;

Compatible with various sizes of samples, easy to upgrade;

Currently the world's most cost-effective industrial machine.

Keyword:
BAT P300 R2R
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