Elegant II-A
Technical indicators:
Sample: up to 12 inches, downward compatible, customizable
Process temperature: RT ~ 400℃, high temperature module can be customized for higher temperature.
Foredrive source pipeline: up to 6 independent pipelines can be customized
Low pressure source heating system: including source bottle and pipeline, RT ~ 200℃
Vacuum system: high performance mechanical pump, can be customized semiconductor molecular pump
Growth mode: Normal growth, stay growth, plasma enhancement (customizable)
Plasma source: RF,mircrowave,customizablecustomizable
Plasma discharge gas source: maximum 4 independent pipes, can be customized
Control system: independently developed operating system + touch screen
Power supply: 50-60Hz, 380V/20A AC power supply
Uniformity: Al2O3 non-uniformity < 1%
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Contact us
Sales call:15655060066潘经理 (销售一处)
13770542509龙经理(销售二处)
15895990041张经理(销售三处)
Address:22nd Floor, Building B, Qingyun Building, 266 Puyun Road, Jiangbei New District, Nanjing
E-mail:sales@aname-nj.com
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