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Atomic Nano-Materials and Equipments Co.,Ltd
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Elegant II-A

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Sample: up to 12 inches, downward compatible, customizable  

Process temperature: RT ~ 400℃, high temperature module can be customized for higher temperature.  

Foredrive source pipeline: up to 6 independent pipelines can be customized  

Low pressure source heating system: including source bottle and pipeline, RT ~ 200℃  

Vacuum system: high performance mechanical pump, can be customized semiconductor molecular pump  

Growth mode: Normal growth, stay growth, plasma enhancement (customizable)  

Plasma source: RF,mircrowavecustomizablecustomizable  

Plasma discharge gas source: maximum 4 independent pipes, can be customized  

Control system: independently developed operating system + touch screen  

Power supply: 50-60Hz, 380V/20A AC power supply  

Uniformity: Al2O3 non-uniformity < 1% 

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Fixed telephone:+025-58277112

Sales call:15655060066潘经理 (销售一处)

                  13770542509龙经理(销售二处)

                  15895990041张经理(销售三处)

Address:22nd Floor, Building B, Qingyun Building, 266 Puyun Road, Jiangbei New District, Nanjing

E-mail:sales@aname-nj.com 

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