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Elegant II-A

Elegant II-A series is Aname’s mature batch-type ALD equipment. This equipment comes with a loading and transfer system that is capable of handling 25 (8” and below) pieces of wafers in a cassette and is therefore suitable for mass production.
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Elegant II-A
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Product Description

With the integration of precision step motor and sensor, the system is able to realize precise wafer loading and unloading with the help of a robotic arm, with a special cooling station. Similar to Elegant II-Y series, Elegant II A series also adopt a dual-hot chamber design and independent precursor line design concept, ensuring efficient precursor utilization and no cross contamination. Several upgrade ports are available to realize simultaneous processing using thermal and PE methods, which are suitable for mass production of compound semiconductor devices.

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Telephone: +025-58277112
Sales Telephone: Manager Hu 13916235350
                            Manager Zhang 13815424556
13815424556Manager Zhang (North China, Northwest China, Northeast China)
Overseas Business Department Tel: Manager 17721046096 Wang
After-sales service telephone: Manager 15850767261 Ni
Address: 22nd and 25th floors, Building B, Qingyun Building, No. 266, Puyun Road, Jiangbei New District, Nanjing

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