Yuanhe Semiconductor has independent intellectual property rights of high vacuum fast and slow double speed valve. High vacuum fast and slow double speed valve is a special type of vacuum valve, mainly used in vacuum systems, to change the direction of air flow and adjust the size of air flow, with two fast and slow modes of operation. It could be customized according to actual needs. Its flexible adaptation to different vacuum processes plays an important role in the field of vacuum technology due to its unique functions and wide range of applications.

Yuanhe Semiconductor's T10 vacuum transfer series undergo strict design standards and manufacturing environments, ensuring high stability and high cleanliness in the operation of the equipment in the Fab. Its modular design enables smaller footprint, improves scalability, and makes it possible to quickly respond to a variety of layout requirements.

Yuanhe Semiconductor independently designed and built the automatic transfer cluster T9 platform for 12 inch wafer, with ISO class1 standard, which meets the needs of advanced manufacturing technology and could substitute similar foreign products. Multi layer precision coating is formed in one step, thereby improving the efficiency of the coating reaction and the reproducibility between batches.

The APC high-speed pressure control butterfly valve with independent intellectual property rights is a high-vacuum valve integrating pressure control, motion structure and sealing, and its main role is to control, regulate and isolate the gas flow rate and flow rate of the vacuum system through the adaptive algorithm adjustment of the length of the valve plate, so as to realize the accurate adjustment and control of the gas flow and vacuum pressure of the vacuum equipment in different processes.