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Batch 25 TALD Series
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Batch 25 TALD Series

Batch 25 TALD series is another breakthrough in the field of advance packaging and photovoltaic. It is a batch-type thermal ALD equipment that deposits 25 wafers at a time, effectively reduces production costs and production capacity.
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Wafer size can be 12” backward compatible, process temperature from RT to 500oC, processing capacity 25pc/chamber, optional loadlock chamber, maximum 4 independent precursor lines, equipped with ozone generator. It provides a new solution to the production capacity and uniformity problems of thin film deposition, which is suitable for mass production in many fields such as advanced packaging, photovoltaic, MEMs, compound semiconductor, etc.

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Telephone: +025-58277112
Sales Telephone: Manager Hu 13916235350
                            Manager Zhang 13815424556
13815424556Manager Zhang (North China, Northwest China, Northeast China)
Overseas Business Department Tel: Manager 17721046096 Wang
After-sales service telephone: Manager 15850767261 Ni
Address: 22nd and 25th floors, Building B, Qingyun Building, No. 266, Puyun Road, Jiangbei New District, Nanjing

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