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Tura 9 Vacuum transfer system
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Tura 9 Vacuum transfer system

Yuanhe Semiconductor independently designed and built the automatic transfer cluster T9 platform for 12 inch wafer, with ISO class1 standard, which meets the needs of advanced manufacturing technology and could substitute similar foreign products. Multi layer precision coating is formed in one step, thereby improving the efficiency of the coating reaction and the reproducibility between batches.
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●  Wafer size: 300mm


●  Base pressure： 10-2pa

●   Aligner : Equipped with Wafer Aligner and AWC

●   Vacuum level: ≤10^(-9)pa*m3/s

●   Cleanliness Class: ISO class1

●   PWP Index: 0.05@0.037um/(<E8/cm2)

●   Transfer Test: ≥5000 pcs cycle test without any errors

●   Wafer Breakage Rate: ≤1/100000

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Telephone: +025-58277112
Sales Telephone: Manager Hu 13916235350
                            Manager Zhang 13815424556
13815424556Manager Zhang (North China, Northwest China, Northeast China)
Overseas Business Department Tel: Manager 17721046096 Wang
After-sales service telephone: Manager 15850767261 Ni
Address: 22nd and 25th floors, Building B, Qingyun Building, No. 266, Puyun Road, Jiangbei New District, Nanjing

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