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T10 Vacuum transfer system
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T10 Vacuum transfer system

Yuanhe Semiconductor's T10 vacuum transfer series undergo strict design standards and manufacturing environments, ensuring high stability and high cleanliness in the operation of the equipment in the Fab. Its modular design enables smaller footprint, improves scalability, and makes it possible to quickly respond to a variety of layout requirements.
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●  Wafer size: 200/300mm

●  Base pressure： 10-1pa

●   Pre-vacuum Chamber : 25pc*2

●   Maximum PM count: 10

●   Number of wafers in cooling chamber: 5pc*2

●   Blade Material: Ceramic/Others

●   Cooling method: PN /Water

●   AWC Accuracy/Range: ±0.01mm/6mm
 

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Telephone: +025-58277112
Sales Telephone: Manager Hu 13916235350
                            Manager Zhang 13815424556
13815424556Manager Zhang (North China, Northwest China, Northeast China)
Overseas Business Department Tel: Manager 17721046096 Wang
After-sales service telephone: Manager 15850767261 Ni
Address: 22nd and 25th floors, Building B, Qingyun Building, No. 266, Puyun Road, Jiangbei New District, Nanjing

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