- A B O U T US -
ANaME was founded in September 2018 by a team of professionals with over 20 years of experience in semiconductor equipment and process development.Our current product lineup includes atomic layer deposition (ALD) equipment and atomic layer etching(ALE) equipment.
Our assembly, testing and R&D centers of the standard in ALD equipment manufacturing field was established in 2021 in Xuzhou, China.
Our subsidiary Jiangsu Yuanhe Precision Manufacturing Co., Ltd. was established in February 2022. It is equipped with imported five-axis machining centers and high-precision metrology equipment, supporting the precision manufacturing of semiconductor equipment.
ANAME is committed to becoming a semiconductor equipment supplier with key technologies such as equipment, materials, processes, and components, and creating a fully ecological and internally circulating environment, focusing on the customization, research and development, production, and sales of semiconductor deposition equipment.
As a game changer, we aim to revolutionize the traditional way of domestic semiconductor equipment manufacturing, based on leading thin film equipment design concepts and driven by strong semiconductor process and material capabilities. Through independent innovation and research and development of equipment, we aim to create a national brand of semiconductor equipment.
Grace-Mx is the first generation of multi-layer flat atomic layer deposition (ALD) system independently developed by ANAME. Adopt unique modular design, through the optimization of cavity and precursor source air intake system, realized the high process stability, and support process of all-round development, including mems, optics, such as chemical and industrial applications, and the development of material covered many oxides (for example SiO2, SnO2, HfO2, Al2O3, etc.), The maximum sample size can be 300mm*300mm, according to the research and development of different fields, the maximum sample size and number of layers can be customized according to customer needs.
P R O D U C T S
ANAME’s main business: atomic layer deposition (ALD), atomic layer etching (ALE) equipment development, production and sales; provision of one-stop material process solutions to different customers; provision of customized material and device photoelectric performance optimization and characterization.
C O N T A C T
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