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  1. Mass production
  2. R&D machine
  3. Customized
  • Mass production

    The first cluster type ALD equipment independently designed by Yuanlei Nano is a key thin film deposition equipment for advanced integrated circuit processes, built on the independently developed Elegant Cluster platform.

    Ultimate Intelligence
    Ultimate flexibility
    Ultimate security
    Ultimate Innovation
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  • R&D machine

    Yuanlei Nano's third-generation research and development ALD/ALE equipment enhances user experience with more user-friendly operation design, mainly targeting universities, research institutes, and small-scale production customers.

    Ultimate Intelligence
    Ultimate flexibility
    Ultimate security
    Ultimate Innovation
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  • Customized

    The batch atomic layer deposition equipment independently developed by Yuan Lei greatly improves production capacity and reduces production and equipment costs, mainly targeting high-capacity industrial customers.

    Ultimate Intelligence
    Ultimate flexibility
    Ultimate security
    Ultimate Innovation
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  • Advanced Logic and Storage Manufacturing

    Introduction to Case Content

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  • Advanced packaging and heterogeneous integration

    Introduction to Case Content

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  • Micro electromechanical systems and sensors

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  • Compound Semiconductors and Microdisplays

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About Us
Nanjing Yuanlei Nano Materials Co., Ltd. (referred to as "Yuanlei Nano") was established in September 2018 by a professional team with nearly 20 years of experience in semiconductor equipment and process research and development, committed to becoming a high-end semiconductor coating equipment supplier. The company's products mainly include atomic layer deposition (ALD) equipment and silicon germanium epitaxy (EPI) equipment, which can be widely used in 2.5D, 3D advanced packaging, compound semiconductors, and advanced process logic storage processes below 28nm.
  • All products are benchmarked against overseas giants

    Leading domestic manufacturers, it has successively won honors such as high-tech enterprise, Nanjing cultivated unicorn enterprise, and Jiangsu province specialized, refined, unique and new small and medium-sized enterprise.

  • Establish four wholly-owned subsidiaries

    Yuanlei Nano has four wholly-owned subsidiaries under its umbrella, forming a collaborative business layout: Yuanlei Nano Materials (Xuzhou) Co., Ltd. was established in May 2021 and has a high standard assembly, testing, and research and development center in the industry; ANAME PTE LTD was established by Yuan Lei in Singapore at the end of 2022, building a global service network covering overseas sales, technology research and development, and supply chain support;

  • Creating a high-end national brand of pure domestic semiconductor equipment

    Yuanlei Nano aims to master core technologies such as equipment, materials, processes, and components, and focuses on customized research and development, production, and sales of advanced semiconductor coating equipment. The company takes innovation as its mission and is committed to breaking through the traditional mode of domestic semiconductor equipment manufacturing.

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Nanjing Yuanlei Nanomaterials Co., Ltd
  • 22nd and 25th floors, Building B, Qingyun Building, No. 266 Puyun Road, Jiangbei New District, Nanjing City
  • +025-58277112

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